Micro stage employs compliant structure is crucial for precision machinery as it can achieve nano-scale resolution fine displacement by deformation. This paper investigates the variations of stiffness and natural frequency due to dimensional tolerances of such a compliant micro stage that is suspended by four leaf springs and rotates with respect to hinges. Performances of the stage are evaluated by finite element method for various dimensions to investigate the effects of dimensions. A series of sensitivity analyses are also performed to investigate how tolerances affect the performance of the stage. It shows that the stiffness and natural frequency of the stage are strongly affected by the dimensions of leaf springs and the hinges. That is, tolerances of these dimensions are crucial and must be well designed and strictly controlled. It further shows that performance variation due to tolerances are nonlinear but can be properly designed with this approach.

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