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Proceedings Papers

Analysys of Piezoelectric Microactuators Using Finite Element Methods

A. R. Barnett, N. G. Naganathan
Proc. ASME. DETC89, 15th Design Automation Conference: Volume 1 — Computer-Aided and Computational Design, 399-406, September 17–21, 1989
Paper No: DETC1989-0064
DOI: https://doi.org/10.1115/DETC1989-0064
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Topics: Finite element methods, Microactuators, Computers, Deformation, Design, Electromechanical actuators, Finite element analysis, Piezoelectric actuators, Piezoelectric ceramics, Piezoelectric materials
Proceedings Papers

Deflection and Force Experimental Verification of a Semicircular Polymeric Piezoelectric Actuator

Diann Brei, James Blechschmidt
Proc. ASME. DETC91, 13th Biennial Conference on Mechanical Vibration and Noise: Structural Vibration and Acoustics, 57-66, September 22–25, 1991
Paper No: DETC1991-0184
DOI: https://doi.org/10.1115/DETC1991-0184
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Topics: Deflection, Piezoelectric actuators, Engineering prototypes, Manufacturing, Bonding, Bubbles, Design, Microactuators
Proceedings Papers

Analysis of Axisymmetric Piezoceramic Microactuators and Designs for Fluid Control Applications

Chenchiah B. Kosaraju, Nagi G. Naganathan
Proc. ASME. DETC91, 17th Design Automation Conference: Volume 2 — Computer-Aided Design, Mechanical Systems Simulation, and Analysis, Mechanisms, and Robotics, 261-270, September 22–25, 1991
Paper No: DETC1991-0128
DOI: https://doi.org/10.1115/DETC1991-0128
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Topics: Fluids, Microactuators, Piezoelectric ceramics, Actuators, Design, Displacement, Finite element analysis, Finite element model, Inks, Jet engines
Proceedings Papers

Design, Modeling and Fabrication of Micro-Robotic Actuators With Ionic Polymeric Gel and SMA Micro-Muscles

Mohsen Shahinpoor, Martin W. J. Burmeister, Wesley Hoffman
Proc. ASME. DETC95, Volume 3C: 15th Biennial Conference on Mechanical Vibration and Noise — Vibration Control, Analysis, and Identification, 639-648, September 17–20, 1995
Paper No: DETC1995-0626
DOI: https://doi.org/10.1115/DETC1995-0626
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Topics: Actuators, Design, Manufacturing, Modeling, Muscle, Robotics, Fibers, Springs, Compression, Electric fields
Proceedings Papers

Experimental Study of Cochlear Dynamics With an Intracochlear Acoustic Micro-Actuator

Sergiy Taylakov, I. Y. Shen
Proc. ASME. IDETC-CIE2019, Volume 8: 31st Conference on Mechanical Vibration and Noise, V008T10A006, August 18–21, 2019
Paper No: DETC2019-97295
DOI: https://doi.org/10.1115/DETC2019-97295
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Topics: Acoustics, Dynamics (Mechanics), Microactuators, Canals, Fluids, Aluminum, Membranes, Cochlear implants, Design, Electrodes
Proceedings Papers

New Insights Into Shape Memory Alloy Bimorph Actuators Formed by Electron Beam Evaporation

Hao Sun, Jianjun Luo, Ming Lu, Dmytro Nykypanchuk, Yong Shi
Proc. ASME. IDETC-CIE2018, Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems, V004T08A019, August 26–29, 2018
Paper No: DETC2018-85812
DOI: https://doi.org/10.1115/DETC2018-85812
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Topics: Actuators, Electron beams, Evaporation, Shape memory alloys, Nickel titanium alloys, Annealing, Microactuators, Dry etching, Finite element analysis, Manufacturing
Proceedings Papers

Vibration Analysis of V-Shaped Beam Electrothermal Microactuators

Zhuo Zhang, Yueqing Yu, Xuping Zhang
Proc. ASME. IDETC-CIE2017, Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems, V004T09A019, August 6–9, 2017
Paper No: DETC2017-67486
DOI: https://doi.org/10.1115/DETC2017-67486
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Topics: Microactuators, Vibration analysis, Vibration, Simulation results, Actuators, Arches, Computer software, Deformation, Design, Finite element analysis
Proceedings Papers

Bi-BCM: A Closed-Form Solution for Fixed-Guided Beams in Compliant Mechanisms

Fulei Ma, Guimin Chen
Proc. ASME. IDETC-CIE2016, Volume 5A: 40th Mechanisms and Robotics Conference, V05AT07A002, August 21–24, 2016
Paper No: DETC2016-59063
DOI: https://doi.org/10.1115/DETC2016-59063
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Topics: Compliant mechanisms, Deflection, Stress, Buckling, Design, Microactuators, Thermomechanics
Proceedings Papers

Dynamics of Thin-Film Piezoelectric Vertical-Rotational Scanning Actuator

Choong-Ho Rhee, Zhen Qiu, Jongsoo Choi, Thomas D. Wang, Kenn R. Oldham
Proc. ASME. IDETC-CIE2015, Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems, V004T09A026, August 2–5, 2015
Paper No: DETC2015-47169
DOI: https://doi.org/10.1115/DETC2015-47169
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Topics: Actuators, Dynamics (Mechanics), Thin films, Mirrors, Resonance, Displacement, Imaging, Microactuators, Microscopy, Photons
Proceedings Papers

Nonlinear Harmonic Vibration Analysis of a Fully Clamped Micro-Beam

Mehran Sadri, Davood Younesian, Ebrahim Esmailzadeh
Proc. ASME. IDETC-CIE2015, Volume 6: 11th International Conference on Multibody Systems, Nonlinear Dynamics, and Control, V006T10A052, August 2–5, 2015
Paper No: DETC2015-46862
DOI: https://doi.org/10.1115/DETC2015-46862
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Topics: Microbeams, Vibration analysis, Equations of motion, Excitation, Galerkin method, Microactuators, Microelectromechanical systems, Nonlinear equations, Poincaré maps, Resonance
Proceedings Papers

A Low Voltage Electrostatic Micro Actuator for Large Out-of-Plane Displacement

Shahrzad Towfighian, Siyuan He, Ridha Ben Mrad
Proc. ASME. IDETC-CIE2014, Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems, V004T09A015, August 17–20, 2014
Paper No: DETC2014-34283
DOI: https://doi.org/10.1115/DETC2014-34283
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Topics: Displacement, Microactuators, Actuators, Mirrors, Design, Electrical measurement, Electrostatic actuators, Finite element model, Lenses (Optics), Modeling
Proceedings Papers

Effects of Added Mass on Lead-Zirconate-Titanate (PZT) Thin-Film Microactuators in Aqueous Environments

Chuan Luo, Chen-Wei Yang, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2013, Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems, V001T09A006, August 4–7, 2013
Paper No: DETC2013-12043
DOI: https://doi.org/10.1115/DETC2013-12043
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Topics: Microactuators, Thin films, Diaphragms (Mechanical devices), Diaphragms (Structural), Silicon, Probes, Water, Dimensions, Electrodes, Actuators
Proceedings Papers

Effects of Air on Enclosure Design of Lead-Zirconate-Titanate (PZT) Thin-Film Diaphragm Microactuators

Chuan Luo, Kai-Yi Hsiao, Perry Cheung, Howard Lin, A. Q. Shen, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2012, Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference, 41-47, August 12–15, 2012
Paper No: DETC2012-70061
DOI: https://doi.org/10.1115/DETC2012-70061
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Topics: Design, Diaphragms (Mechanical devices), Diaphragms (Structural), Microactuators, Thin films, Cavities, Silicon, Stiffness, Electrodes, Springs
Proceedings Papers

Cost-Effective Measurements of Piezoelectric Coefficient d 33 of Thin-Film PZT Using a Mini Force Hammer

Qing Guo, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2011, Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference, 269-277, August 28–31, 2011
Paper No: DETC2011-47512
DOI: https://doi.org/10.1115/DETC2011-47512
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Topics: Hammers, Thin films, Actuators, Boundary-value problems, Disks, Finite element analysis, Microactuators, Modeling, Piezoelectric materials, Piezoelectricity
Proceedings Papers

An Exploration of Buckling Modes and Deflection of a Fixed-Guided Beam

Gregory L. Holst, Gregory H. Teichert, Brian D. Jensen
Proc. ASME. IDETC-CIE2010, Volume 2: 34th Annual Mechanisms and Robotics Conference, Parts A and B, 645-654, August 15–18, 2010
Paper No: DETC2010-29076
DOI: https://doi.org/10.1115/DETC2010-29076
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Topics: Buckling, Deflection, Displacement, Finite element model, Microactuators, Shapes, Stress, Thermomechanics
Proceedings Papers

Kinematically Excited Large Angle Tilting Actuator

Assaf Ya’akobovitz, Slava Krylov
Proc. ASME. IDETC-CIE2010, Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems, 555-560, August 15–18, 2010
Paper No: DETC2010-28454
DOI: https://doi.org/10.1115/DETC2010-28454
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Topics: Actuators, Manufacturing, Microactuators, Reactive-ion etching, Semiconductor wafers, Silicon-on-insulator, Transducers
Proceedings Papers

Stabilization of a Parallel-Plate Microactuator via Control Lyapunov Functions

S. A. M. Lajimi, G. R. Heppler
Proc. ASME. IDETC-CIE2010, Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems, 777-784, August 15–18, 2010
Paper No: DETC2010-28956
DOI: https://doi.org/10.1115/DETC2010-28956
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Topics: Microactuators, Actuators, Control equipment, Microelectromechanical systems, Computer simulation, Electrodes, Robustness
Proceedings Papers

Laser-Powered Sub-mm Untethered Microrobots

Muhammed R. Pac, Dan O. Popa
Proc. ASME. IDETC-CIE2010, Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems, 863-872, August 15–18, 2010
Paper No: DETC2010-29011
DOI: https://doi.org/10.1115/DETC2010-29011
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Topics: Lasers, Actuators, Signals, Design, Inventions, Laser beams, Microactuators, Parametric design
Proceedings Papers

Measurements of Piezoelectric Constant D 33 of Lead Zirconate Titanate (PZT) Through Use of a Mini Impact Hammer

Qing Guo, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 501-505, August 30–September 2, 2009
Paper No: DETC2009-86157
DOI: https://doi.org/10.1115/DETC2009-86157
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Topics: Hammers, Actuators, Boundary-value problems, Thin films, Circuits, Microactuators, Piezoelectric materials, Sensors, Signal to noise ratio, Stress
Proceedings Papers

Optimization of Piezoelectric Uniflex Microactuators

Hareesh K. R. Kommepalli, Christopher D. Rahn, Srinivas A. Tadigadapa
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 513-520, August 30–September 2, 2009
Paper No: DETC2009-87594
DOI: https://doi.org/10.1115/DETC2009-87594
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Topics: Microactuators, Optimization, Actuators, Displacement, Piezoelectric actuators, Switches