Abstract

We have fabricated a magnetically actuated microplatform scanner for use in a catheter-based intravascular ultrasound imaging (IVU) system. The torsional microplatform is fabricated from low stress silicon nitride with electroplated-Ni stripes for the magnetic material. Experiments with the microplatform have shown it capable of positioning an attached ultrasonic source (350 by 350 by 400 μm3 with a mass of 150 μg) through a total scan angle of 90°. The devices were evaluated in both air and immersed in deionized water. An IVU system based on this microplatform promises lower cost and greater flexibility than are provided by present state-of-the-art mechanically driven IVU systems.

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