In this paper we present three techniques to improve optical power handling capacity of micro-mirrors: (a) improving flexure conduction, (b) improving reflectivity of micro-mirrors and (c) using silicon carbide as MEMS structural material. Mirrors fabricated in Multi-User MEMS Processes (MUMPs) are used as prototype models. It is shown numerically that these three techniques can improve the power handling capacity of the mirrors by factors of 1.25, 4–13 and 7 respectively. Further enhancement can be achieved by using the combination of these methods. Numerical work in this paper was done using Coventorware® while experiments were carried out using an 808 nm center wavelength laser diode with maximum power of 1 W.

This content is only available via PDF.
You do not currently have access to this content.