This paper reports a micromachined combustor and its application to micro thermoelectric power generation. The combustor chamber is covered by a ∼1.3μm thick dielectric diaphragm which is supported by a silicon support rim bonded to a glass substrate. The diaphragm is coated with Pt-catalyst and incorporates a heater for ignition. Scaling effects on self-sustained catalytic combustion are investigated for a square combustor chamber. The small size limit for self-sustained combustion at a hydrogen flow rate of ∼3sccm is found to be between 1 to 2mm. Very large temperature gradients can be achieved on diaphragm because of its low thermal conductance and the high combustion temperature. This combustor configuration is used in a micro thermoelectric power generation chip. The output power level of the generator has been measured to be ∼3μW/thermocouple at a hydrogen flow rate of 3.1sccm.
A Micromachined Combustor and Its Application to Micro Thermoelectric Power Generation
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Zhang, C, Najafi, K, Bernal, LP, & Washabaugh, PD. "A Micromachined Combustor and Its Application to Micro Thermoelectric Power Generation." Proceedings of the ASME 2002 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. New Orleans, Louisiana, USA. November 17–22, 2002. pp. 1-6. ASME. https://doi.org/10.1115/IMECE2002-33272
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