The quality factor of MEMS-based microresonators is often limited due to damping of the resonator structure and the surrounding air. A possible avenue to enhance the quality factor is to incorporate a negative damping feedback to reduce the damping of the resonator for those vibration modes of interest. This method is particularly easy to implement for piezoelectric based microresonators, because piezoelectric materials can serve as a sensor and an actuator simultaneously. This paper first demonstrates the concept on a silicon cantilever with a PZT thin-film actuator and a laser Doppler vibrometer as an external sensing element. Then the paper describes a design of PZT thin-film actuator consisting of a diaphragm suspension and multiple electrodes. Some of the electrodes serve as the sensors and others as actuators to reduce resonator damping. This design can potentially be used for microresonators without using external sensing elements.
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ASME 2006 International Mechanical Engineering Congress and
Exposition
November 5–10, 2006
Chicago, Illinois, USA
Conference Sponsors:
- Design Engineering Division and Computers and Information in Engineering Division
ISBN:
0-7918-4767-5
PROCEEDINGS PAPER
Feasibility Study of Smart PZT Thin-Film Microresonators
I. Y. Shen
I. Y. Shen
University of Washington
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Chia-Che Wu
National Chung-Hsing University
Cheng-Chun Lee
University of Washington
G. Z. Cao
University of Washington
I. Y. Shen
University of Washington
Paper No:
IMECE2006-13931, pp. 7-11; 5 pages
Published Online:
December 14, 2007
Citation
Wu, C, Lee, C, Cao, GZ, & Shen, IY. "Feasibility Study of Smart PZT Thin-Film Microresonators." Proceedings of the ASME 2006 International Mechanical Engineering Congress and Exposition. Design Engineering and Computers and Information in Engineering, Parts A and B. Chicago, Illinois, USA. November 5–10, 2006. pp. 7-11. ASME. https://doi.org/10.1115/IMECE2006-13931
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