In the present study, multilayer TiN/CrN coatings at different bilayer thicknesses have been deposited on silicon (100) and 316 stainless steel substrates using reactive DC magnetron sputtering technique. Nanoindentation, nanoscratch and ball-on-disk tribometer tests were used to characterize the films. Nanoindentation measurements showed enhancement in hardness values for all multilayer coatings with maximum hardness reaching 34 GPa which is about 45% improvement over the rule of mixtures. Nanoscratch tests revealed higher critical loads for multilayer coatings compared to monolayer TiN and CrN coatings. The tribometer tests showed better sliding wear performance for TiN/CrN superlattices.

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