Solid-state nanopore has already shown success of single molecule detection and graphene nanopore is potential for successful DNA sequencing. Here, we present a fast and controllable way to fabricate sub-5 nm nanopore on graphene membrane. The process includes two steps: sputtering a large size nanopore using a conventional focused ion beam (FIB) and shrinking the large nanopore to a few nanometers using scanning electron microscope (SEM). We also demonstrated the ability of the graphene nanopores fabricated in this manner to detect individual 48Kbp λ-DNA molecules.
Shrinking Graphene Nanopore Using Electron-Beam-Induced Deposition for Single Molecule Detection
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Ma, J, Zhao, W, Liu, L, Sha, J, & Chen, Y. "Shrinking Graphene Nanopore Using Electron-Beam-Induced Deposition for Single Molecule Detection." Proceedings of the ASME 2015 International Mechanical Engineering Congress and Exposition. Volume 2B: Advanced Manufacturing. Houston, Texas, USA. November 13–19, 2015. V02BT02A043. ASME. https://doi.org/10.1115/IMECE2015-50246
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