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Proceedings Papers

Flow Past a Micro-Sphere in a Pipe: Effects of Rarefaction

Hsin-Chih F. Liu, Ali Beskok, Nikolaos Gatsonis, George E. Karniadakis
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 445-452, November 15–20, 1998
Paper No: IMECE1998-1283
https://doi.org/10.1115/IMECE1998-1283
View Paper titled, Flow Past a Micro-Sphere in a Pipe: Effects of Rarefaction
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Topics: Flow (Dynamics), Pipes, Knudsen number, Algorithms, Design, Drag (Fluid dynamics), Rarefied fluid dynamics, Reynolds number, Simulation, Slip flow
Proceedings Papers

MHD (Magnetohydrodynamic) Micropump Using Lorentz Force

Jaesung Jang, Seung S. Lee
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 439-444, November 15–20, 1998
Paper No: IMECE1998-1282
https://doi.org/10.1115/IMECE1998-1282
View Paper titled, MHD (Magnetohydrodynamic) Micropump Using Lorentz Force
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Topics: Magnetohydrodynamics, Micropumps, Flow (Dynamics), Pressure, Electric fields, Fluids, Magnetic induction
Proceedings Papers

Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch

Sumit Majumder, N. E. McGruer, Paul M. Zavracky, Richard H. Morrison, George G. Adams, Jacqueline Krim
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 341-346, November 15–20, 1998
Paper No: IMECE1998-1265
https://doi.org/10.1115/IMECE1998-1265
View Paper titled, Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch
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Topics: Contact resistance, Modeling, Switches, Gates (Closures), Cantilever beams, Coating processes, Coatings, Currents, Cycles, Electrodes
Proceedings Papers

Convection-Based Accelerometer and Tilt Sensor Implemented in Standard CMOS

Veljko Milanović, Edwin Bowen, Nim Tea, John Suehle, Beverly Payne, Mona Zaghloul, Michael Gaitan
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 487-490, November 15–20, 1998
Paper No: IMECE1998-1289
https://doi.org/10.1115/IMECE1998-1289
View Paper titled, Convection-Based Accelerometer and Tilt Sensor Implemented in Standard CMOS
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Topics: Accelerometers, Complementary metal oxide semiconductors, Convection, Sensors, Temperature, Temperature sensors, Bridges (Structures), Errors, Natural convection, Thermocouples
Proceedings Papers

A High Performance Hand-Held Gas Chromatograph

Conrad M. Yu, Matthew Lucas, Jackson C. Koo, Paul Stratton, Terri DeLima, Elaine Behymer
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 481-486, November 15–20, 1998
Paper No: IMECE1998-1288
https://doi.org/10.1115/IMECE1998-1288
View Paper titled, A High Performance Hand-Held Gas Chromatograph
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Topics: Gas chromatography, Microelectromechanical systems, Sensors, Ejectors, Separation (Technology), Batteries, Bridges (Structures), Computer software, Electrical measurement, Electricity (Physics)
Proceedings Papers

Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass

Jong Soo Ko, Young-Ho Cho, Byung Man Kwak, Kwanhum Park
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 353-356, November 15–20, 1998
Paper No: IMECE1998-1267
https://doi.org/10.1115/IMECE1998-1267
View Paper titled, Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass
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Topics: Cantilevers, Design, Manufacturing, Accelerometers, Microfabrication, Cantilever beams, Mass production, Resonance, Sawing, Semiconductor wafers
Proceedings Papers

Design, Fabrication and Uncertainty Evaluation of a Surface-Micromachined Capacitive Microaccelerometer

Ki-Ho Han, Jong-Pal Kim, Young-Ho Cho
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 347-352, November 15–20, 1998
Paper No: IMECE1998-1266
https://doi.org/10.1115/IMECE1998-1266
View Paper titled, Design, Fabrication and Uncertainty Evaluation of a Surface-Micromachined Capacitive Microaccelerometer
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Topics: Design, Manufacturing, Micromachining, Uncertainty, Accelerometers, Capacitance, Electrodes, Resonance, Circuits, Engineering prototypes
Proceedings Papers

Integrated Modeling and Testing of a Micro Hinged Structure for Sliding Friction Measurement

James M. Redmond, Maarten P. de Boer, Terry A. Michalske
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 305-311, November 15–20, 1998
Paper No: IMECE1998-1259
https://doi.org/10.1115/IMECE1998-1259
View Paper titled, Integrated Modeling and Testing of a Micro Hinged Structure for Sliding Friction Measurement
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Topics: Modeling, Sliding friction, Testing, Friction, Design, Excitation, Bending (Stress), Computer simulation, Cycles, Deflection
Proceedings Papers

First Discrete Time Full-System Inertial Microsensor Performance Simulation Tool

Michael D. Pottenger, William J. Kaiser
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 519-524, November 15–20, 1998
Paper No: IMECE1998-1294
https://doi.org/10.1115/IMECE1998-1294
View Paper titled, First Discrete Time Full-System Inertial Microsensor Performance Simulation Tool
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Topics: Microsensors, Simulation, Resonance, Noise (Sound), Sensors, Bridges (Structures), Circuits, Complementary metal oxide semiconductors, Dynamics (Mechanics), Feedback
Proceedings Papers

Liquid Mass Flow Sensor Using Dynamic Pressure Detection

M. Ashauer, H. Glosch, H. Ashauer, H. Sandmaier, W. Lang
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 421-425, November 15–20, 1998
Paper No: IMECE1998-1279
https://doi.org/10.1115/IMECE1998-1279
View Paper titled, Liquid Mass Flow Sensor Using Dynamic Pressure Detection
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Topics: Flow sensors, Pressure, Sensors, Dimensions, Engineering prototypes, Flow (Dynamics), Pressure sensors, Silicon
Proceedings Papers

Influence of Fabrication and Crystal Orientation on the Strength of Silicon Microridges

Quanfang Chen, Da-Jeng Yao, Chang-Jin “CJ” Kim, Greg P. Carman
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 413-420, November 15–20, 1998
Paper No: IMECE1998-1278
https://doi.org/10.1115/IMECE1998-1278
View Paper titled, Influence of Fabrication and Crystal Orientation on the Strength of Silicon Microridges
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Topics: Crystal structure, Manufacturing, Silicon, Chemical etching, Crystals, Reactive-ion etching, Dry etching, Anisotropy, Shear (Mechanics), Shear strength
Proceedings Papers

Micromachine Wedge Stepping Motor

James J. Allen, Heather K. Schriner
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 317-322, November 15–20, 1998
Paper No: IMECE1998-1261
https://doi.org/10.1115/IMECE1998-1261
View Paper titled, Micromachine Wedge Stepping Motor
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Topics: Stepper motors, Wedges, Signals, Design, Gear teeth, Manufacturing, Testing, Torque
Proceedings Papers

Computer-Aided Micro-Mechanism Design

Elisha Sacks, James Allen
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 313-316, November 15–20, 1998
Paper No: IMECE1998-1260
https://doi.org/10.1115/IMECE1998-1260
View Paper titled, Computer-Aided Micro-Mechanism Design
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Topics: Computer-aided engineering, Design, Micromechanical devices, Computer software, Kinematics, Space, Computer-aided design, Gears, Geometry, Micromachining
Proceedings Papers

Suspended Moving Channels and Channel Actuators for Microfluidic Applications

John M. Chong, Noel C. MacDonald
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 433-438, November 15–20, 1998
Paper No: IMECE1998-1281
https://doi.org/10.1115/IMECE1998-1281
View Paper titled, Suspended Moving Channels and Channel Actuators for Microfluidic Applications
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Topics: Actuators, Microfluidics, Fluids, Chemical reactions, Crystals, Density, Design, Excitation, Metals, Resonance
Proceedings Papers

Thermal Flow Sensor for Liquids and Gases

M. Ashauer, H. Glosch, F. Hedrich, N. Hey, H. Sandmaier, W. Lang
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 427-432, November 15–20, 1998
Paper No: IMECE1998-1280
https://doi.org/10.1115/IMECE1998-1280
View Paper titled, Thermal Flow Sensor for Liquids and Gases
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Topics: Flow sensors, Gases, Pollution, Sensors
Proceedings Papers

Fabrication of 109.5° Micro V-Grooves Using a Two-Step Anisotropic Etching Technique

Wen-Tien Chang Chien, Liwei Lin, Yi-Chung Lo, Chia-Ou Chang
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 361-364, November 15–20, 1998
Paper No: IMECE1998-1269
https://doi.org/10.1115/IMECE1998-1269
View Paper titled, Fabrication of 109.5° Micro V-Grooves Using a Two-Step Anisotropic Etching Technique
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Topics: Anisotropy, Etching, Manufacturing, Shapes, Design, Microelectromechanical systems, Semiconductor wafers
Proceedings Papers

Design and Strength Evaluation of an Anodically Bonded Pressurized Cavity Array for Wafer-Level MEMS Packaging

Jeung Sang Go, Young-Ho Cho
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 357-360, November 15–20, 1998
Paper No: IMECE1998-1268
https://doi.org/10.1115/IMECE1998-1268
View Paper titled, Design and Strength Evaluation of an Anodically Bonded Pressurized Cavity Array for Wafer-Level MEMS Packaging
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Topics: Cavities, Design, MEMS packaging, Semiconductor wafers, Bonding, Plates (structures), Pressure, Design methodology, Failure, Finite element analysis
Proceedings Papers

An 8x8 Robust Capacitive Pressure Sensor Array

Sung-Pil Chang, Jeong-Bong Lee, Mark G. Allen
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 513-517, November 15–20, 1998
Paper No: IMECE1998-1293
https://doi.org/10.1115/IMECE1998-1293
View Paper titled, An 8x8 Robust Capacitive Pressure Sensor Array
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Topics: Pressure sensors, Micromachining, Sensors, Manufacturing, Stainless steel, Capacitance, Design, Electrodes, Flow (Dynamics), Lamination
Proceedings Papers

Design, Fabrication and Optical Characterization of Micro Fresnel Zone Plates

Wen-Hong Lee, Liwei Lin
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 505-511, November 15–20, 1998
Paper No: IMECE1998-1292
https://doi.org/10.1115/IMECE1998-1292
View Paper titled, Design, Fabrication and Optical Characterization of Micro Fresnel Zone Plates
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Topics: Design, Manufacturing, Plates (structures), Gamma rays, Glass, Helium-neon lasers, Image formation, Infrared radiation, Membranes, Stress
Proceedings Papers

Fracture and Sub-Critical Crack Growth Behavior of Micromachined Single Crystal Silicon Structures

Alissa M. Fitzgerald, R. Suryanarayanan Iyer, Reinhold H. Dauskardt, Thomas W. Kenny
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 395-399, November 15–20, 1998
Paper No: IMECE1998-1275
https://doi.org/10.1115/IMECE1998-1275
View Paper titled, Fracture and Sub-Critical Crack Growth Behavior of Micromachined Single Crystal Silicon Structures
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Topics: Crystals, Fracture (Materials), Micromachining, Silicon, Stress, Electrical resistance, Geometry