... Abstract Low conductivity (low-k) dielectric material is used in the sandwich structure of next-generation semiconductor devices in order to reduce the RC time delay. While global flatness of wafer surface becomes critical for deep sub-micro semiconductor fabrication process, chemical...

... interconnect dimensions has become a serious concern for the development of future-generation electronics. To reduce the delay due to resistance R, a major technology change was the replacement of Aluminum (Al) with Copper (Cu) interconnects. Recently, some investigators have suggested using low-k dielectric...