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Proceedings Papers

Dissolution Behavior of Silicon Nitride Thin Films in a Simulated Ocular Environment

Christoph Schade, Alex Phan, Kevin Joslin, Phuong Truong, Frank Talke
Proc. ASME. ISPS2020, ASME 2020 29th Conference on Information Storage and Processing Systems, V001T06A004, June 24–25, 2020
Paper No: ISPS2020-1946
https://doi.org/10.1115/ISPS2020-1946
View Paper titled, Dissolution Behavior of Silicon Nitride Thin Films in a Simulated Ocular Environment
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Topics: Microelectromechanical systems, Silicon nitride ceramics, Thin films
Proceedings Papers

Analytical Modeling of an Implantable Opto-Mechanical Pressure Sensor to Study Long Term Drift

Alex Phan, Phuong Truong, Christoph Schade, Kevin Joslin, Frank Talke
Proc. ASME. ISPS2020, ASME 2020 29th Conference on Information Storage and Processing Systems, V001T06A003, June 24–25, 2020
Paper No: ISPS2020-1945
https://doi.org/10.1115/ISPS2020-1945
View Paper titled, Analytical Modeling of an Implantable Opto-Mechanical Pressure Sensor to Study Long Term Drift
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Topics: Modeling, Pressure sensors, Sensors, Membranes, Deflection, Design, Epoxy adhesives, Epoxy resins, Geometry, Manufacturing
Proceedings Papers

MEMS-Based Micro Probe Incorporating Electrostatic Actuator Towards Friction Force Microscopy With Accurate Gap Control

Kenji Fukuzawa, Mikito Takahashi, Yusuke Hori, Shintaro Itoh, Hedong Zhang
Proc. ASME. ISPS-MIPE2018, ASME-JSME 2018 Joint International Conference on Information Storage and Processing Systems and Micromechatronics for Information and Precision Equipment, V001T08A004, August 29–30, 2018
Paper No: ISPS-MIPE2018-8542
https://doi.org/10.1115/ISPS-MIPE2018-8542
View Paper titled, MEMS-Based Micro Probe Incorporating Electrostatic Actuator Towards Friction Force Microscopy With Accurate Gap Control
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Topics: Electrostatic actuators, Friction, Microelectromechanical systems, Microscopy, Probes, Lubrication, Actuators, Force measurement, Microscopes
Proceedings Papers

Design of Mechaless LiDAR Optical System With Large FOV Using Liquid Lens and Fisheye Lens

Hyun Choi, Wan-Chin Kim
Proc. ASME. ISPS-MIPE2018, ASME-JSME 2018 Joint International Conference on Information Storage and Processing Systems and Micromechatronics for Information and Precision Equipment, V001T10A001, August 29–30, 2018
Paper No: ISPS-MIPE2018-8517
https://doi.org/10.1115/ISPS-MIPE2018-8517
View Paper titled, Design of Mechaless LiDAR Optical System With Large FOV Using Liquid Lens and Fisheye Lens
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Topics: Design, Lenses (Optics), Mechanical drives, Microelectromechanical systems, Mirrors, Reliability, Resolution (Optics), Stability
Proceedings Papers

A Data Mining Approach for Diagnosis of Nonlinear Stochastic Dynamics of TFC Active Slider in Nano-Meter Spacing

Yongfu Wang, Gang (Sheng) Chen, Jen-Yuan (James) Chang
Proc. ASME. ISPS2014, 2014 Conference on Information Storage and Processing Systems, V001T11A001, June 23–24, 2014
Paper No: ISPS2014-6941
https://doi.org/10.1115/ISPS2014-6941
View Paper titled, A Data Mining Approach for Diagnosis of Nonlinear Stochastic Dynamics of TFC Active Slider in Nano-Meter Spacing
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Topics: Data mining, Dynamics (Mechanics), Disks, Lubricants, Storage, Surface roughness, Contact dynamics, Emission spectroscopy, Microelectromechanical systems, Mining
Proceedings Papers

An Insight Into the Nonlinear Touchdown Dynamics of TFC Active Slider

Gang (Sheng) Chen, Jianfeng Xu, J.-Y. Chang
Proc. ASME. ISPS2013, ASME 2013 Conference on Information Storage and Processing Systems, V001T01A001, June 24–25, 2013
Paper No: ISPS2013-2803
https://doi.org/10.1115/ISPS2013-2803
View Paper titled, An Insight Into the Nonlinear Touchdown Dynamics of TFC Active Slider
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Topics: Dynamics (Mechanics), Disks, Nonlinear dynamics, Air bearings, Design, Lubricants, Microelectromechanical systems, Pressing, Storage, Transducers
Proceedings Papers

Position Alignment of Micro Manipulator Using Root Mean Square Errors for Maskless Lithography System

Yong Seok Ihn, Sae Whan Park, Ja Choon Koo
Proc. ASME. ISPS2013, ASME 2013 Conference on Information Storage and Processing Systems, V001T07A013, June 24–25, 2013
Paper No: ISPS2013-2943
https://doi.org/10.1115/ISPS2013-2943
View Paper titled, Position Alignment of Micro Manipulator Using Root Mean Square Errors for Maskless Lithography System
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Topics: Errors, Manipulators, Maskless lithography, Mirrors, Photomasks, Lithography, Microelectromechanical systems, Manufacturing, Semiconductors (Materials)
Proceedings Papers

Rotary Silicon Polymeric Composite Thermal Micro-Actuator

Jiaping Yang, Cheng Peng Tan, Nyok Boon Chong, Gih Keong Lau
Proc. ASME. ISPS2013, ASME 2013 Conference on Information Storage and Processing Systems, V001T02A002, June 24–25, 2013
Paper No: ISPS2013-2891
https://doi.org/10.1115/ISPS2013-2891
View Paper titled, Rotary Silicon Polymeric Composite Thermal Micro-Actuator
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Topics: Microactuators, Polymer composites, Silicon, Displacement, Resonance, Design, Shock (Mechanics), Actuators, Composite materials, Disks