Picosecond laser ablation of Polydimethylsiloxane (PDMS) has been studied experimentally. The measurements show that laser ablation rate per pulse increases with laser fluence and pulse number. The laser-drilled hole diameter increases with pulse number, and it saturates above certain pulse number for low fluence. The study shows that picosecond laser ablation may provide a good solution for micromachining PDMS, which is more flexible and versatile than the replica molding technique.

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