This paper reports on experimental and computational investigations into the thermal performance of microelectromechanical systems (MEMS) as a function of the pressure of the surrounding gas. High spatial resolution Raman thermometry was used to measure the temperature profiles on electrically heated, polycrystalline silicon bridges that are nominally wide, thick, and either or long in nitrogen atmospheres with pressures ranging from 0.05 Torr to 625 Torr (6.67 Pa–83.3 kPa). Finite element modeling of the thermal behavior of the MEMS bridges is performed and compared with the experimental results. Noncontinuum gas effects are incorporated into the continuum finite element model by imposing temperature discontinuities at gas-solid interfaces that are determined from noncontinuum simulations. The results indicate that gas-phase heat transfer is significant for devices of this size at ambient pressures but becomes minimal as the pressure is reduced below 5 Torr. The model and experimental results are in qualitative agreement, and better quantitative agreement requires increased accuracy in the geometrical and material property values.
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Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr
Leslie M. Phinney,
Leslie M. Phinney
Engineering Sciences Center,
e-mail: lmphinn@sandia.gov
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346
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Justin R. Serrano,
Justin R. Serrano
Engineering Sciences Center,
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346
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Edward S. Piekos,
Edward S. Piekos
Engineering Sciences Center,
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346
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John R. Torczynski,
John R. Torczynski
Engineering Sciences Center,
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346
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Michael A. Gallis,
Michael A. Gallis
Engineering Sciences Center,
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346
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Allen D. Gorby
Allen D. Gorby
Engineering Sciences Center,
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346
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Leslie M. Phinney
Engineering Sciences Center,
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346e-mail: lmphinn@sandia.gov
Justin R. Serrano
Engineering Sciences Center,
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346
Edward S. Piekos
Engineering Sciences Center,
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346
John R. Torczynski
Engineering Sciences Center,
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346
Michael A. Gallis
Engineering Sciences Center,
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346
Allen D. Gorby
Engineering Sciences Center,
Sandia National Laboratories
, P.O. Box 5800, Albuquerque, NM 87185-0346J. Heat Transfer. Jul 2010, 132(7): 072402 (9 pages)
Published Online: April 28, 2010
Article history
Received:
May 18, 2009
Revised:
December 10, 2009
Online:
April 28, 2010
Published:
April 28, 2010
Citation
Phinney, L. M., Serrano, J. R., Piekos, E. S., Torczynski, J. R., Gallis, M. A., and Gorby, A. D. (April 28, 2010). "Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr." ASME. J. Heat Transfer. July 2010; 132(7): 072402. https://doi.org/10.1115/1.4000965
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