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Keywords: Raman thermometry
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Journal Articles

Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr

Leslie M. Phinney, Justin R. Serrano, Edward S. Piekos, John R. Torczynski, Michael A. Gallis, Allen D. Gorby
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. July 2010, 132(7): 072402.
https://doi.org/10.1115/1.4000965
Published Online: April 28, 2010
... gas. High spatial resolution Raman thermometry was used to measure the temperature profiles on electrically heated, polycrystalline silicon bridges that are nominally 10 μ m wide, 2.25 μ m thick, and either 200 μ m or 400 μ m long in nitrogen atmospheres with pressures ranging from 0.05 Torr to 625...
View Article titled, <span class="search-highlight">Raman</span> <span class="search-highlight">Thermometry</span> Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr
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Topics: Bridges (Structures), Finite element analysis, Heat transfer, Microelectromechanical systems, Pressure, Simulation, Temperature, Temperature measurement, Heat conduction, Temperature profiles