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Keywords: low-pressure effects
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Journal Articles
Leslie M. Phinney, Justin R. Serrano, Edward S. Piekos, John R. Torczynski, Michael A. Gallis, Allen D. Gorby
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. July 2010, 132(7): 072402.
Published Online: April 28, 2010
... agreement requires increased accuracy in the geometrical and material property values. Raman thermometry MEMS finite element heat conduction simulations noncontinuum gas-phase heat-transfer model low-pressure effects suspended microbridge The environmental conditions inside a packaged MEMS...
