The development of manufacturing tools and processes capable of precisely positioning and manipulating nanoscale components and materials is still in its embryonic stage. Microactuators are emerging as important tools capable of precisely positioning and manipulating nanoscale components and materials. This paper provides a summary of the state-of-the-art in the design, fabrication, and application of microactuators for nanoscale manufacturing and assembly. Key characteristics and design models of electrothermal and electrostatic microactuators are described and compared. Specific design requirements for their functionality at the nanoscale are discussed. The results demonstrate the limitations of existing microactuator designs and key challenges associated with their design, modeling, and performance characterization for nanoscale positioning, assembly, and manipulation.
Issue Section:
Special Issue on Nanomanufacturing
1.
Fedder
, G. K.
, 2003, “MEMS Fabrication
,” Proceedings of the 33rd International Test Conference
, pp. 691
–698
.2.
Sardan
, O.
, Eichhorn
, V.
, Petersen
, D. H.
, Fatikow
, S.
, Sigmund
, O.
, and Boggild
, P.
, 2008, “Rapid Prototyping of Nanotube-Based Devices Using Topology-Optimized Microgrippers
,” Nanotechnology
0957-4484, 19
(49
), p. 495503
.3.
Kimberly
, T.
, Matthew
, E.
, Aaron
, G.
, George
, S.
, and Phil
, F.
, 2004, “FIB Prepared TEM Sample Lift-Out Using MEMS Grippers
,” Microsc. Microanal.
1431-9276, 10
, (S02), pp. 1144
–1145
.4.
Chronis
, N.
, and Lee
, L. P.
, 2005, “Electrothermally Activated SU-8 Microgripper for Single Cell Manipulation in Solution
,” J. Microelectromech. Syst.
1057-7157, 14
(4
), pp. 857
–863
.5.
Kim
, K.
, Liu
, X.
, Zhang
, Y.
, and Sun
, Y.
, 2008, “Nanonewton Force-Controlled Manipulation of Biological Cells Using a Monolithic MEMS Microgripper With Two-Axis Force Feedback
,” J. Micromech. Microeng.
0960-1317, 18
(5
), p. 055013
.6.
Requicha
, A. A. G.
, 2003, “Nanorobots, NEMS, and Nanoassembly
,” Proc. IEEE
0018-9219, 9
, pp. 1922
–1933
.7.
Devasia
, S.
, Eleftheriou
, E.
, and Moheimani
, S. O. R.
, 2007, “A Survey of Control Issues in Nanopositioning
,” IEEE Trans. Control Syst. Technol.
1063-6536, 15
(5
), pp. 802
–823
.8.
Haliyo
, D. S.
, Regnier
, S.
, and Guinot
, J. -C.
, 2003, “[mü]MAD, the Adhesion Based Dynamic Micro-Manipulator
,” Eur. J. Mech. A/Solids
0997-7538, 22
(6
), pp. 903
–916
.9.
Li
, J.
, Liu
, A. Q.
, and Zhang
, Q. X.
, 2006, “Tolerance Analysis for Comb-Drive Actuator Using DRIE Fabrication
,” Sens. Actuators, A
0924-4247, 125
(2
), pp. 494
–503
.10.
Chen
, B.
, and Miao
, J.
, 2007, “Influence of Deep RIE Tolerances on Comb-Drive Actuator Performance
,” J. Phys. D: Appl. Phys.
0022-3727, 40
(4
), pp. 970
–976
.11.
Jungen
, A.
, Pfenninger
, M.
, Tonteling
, M.
, Stampfer
, C.
, and Hierold
, C.
, 2006, “Electrothermal Effects at the Microscale and Their Consequences on System Design
,” J. Micromech. Microeng.
0960-1317, 16
(8
), pp. 1633
–1638
.12.
Ozsun
, O.
, Alaca
, B. E.
, Yalcinkaya
, A. D.
, Yilmaz
, M.
, Zervas
, M.
, and Leblebici
, Y.
, 2009, “On Heat Transfer at Microscale With Implications for Microactuator Design
,” J. Micromech. Microeng.
0960-1317, 19
(4
), p. 045020
.13.
Kiuchi
, M.
, Matsui
, S.
, and Isono
, Y.
, 2007, “Mechanical Characteristics of FIB Deposited Carbon Nanowires Using an Electrostatic Actuated Nano Tensile Testing Device
,” J. Microelectromech. Syst.
1057-7157, 16
(2
), pp. 191
–201
.14.
Zhu
, Y.
, Corigliano
, A.
, and Espinosa
, H. D.
, 2006, “A Thermal Actuator for Nanoscale In Situ Microscopy Testing: Design and Characterization
,” J. Micromech. Microeng.
0960-1317, 16
(2
), pp. 242
–253
.15.
Haque
, M. A.
, 2005, “In Situ Tensile Testing of Nanoscale Freestanding Thin Films Inside a Transmission Electron Microscope
,” J. Mater. Res.
0884-2914, 20
(7
), pp. 1769
–1777
.16.
Haque
, M. A.
, and Saif
, M. T. A.
, 2002, “Application of MEMS Force Sensors for In Situ Mechanical Characterization of Nano-Scale Thin films in SEM and TEM
,” Sens. Actuators, A
0924-4247, 97–98
, pp. 239
–245
.17.
Wilson
, N. R.
, and Macpherson
, J. V.
, 2009, “Carbon Nanotube Tips for Atomic Force Microscopy
,” Nat. Nanotechnol.
1748-3387, 4
(8
), pp. 483
–491
.18.
Piner
, R. D.
, Zhu
, J.
, Xu
, F.
, Hong
, S.
, and Mirkin
, C. A.
, 1999, “Dip-Pen Nanolithography
,” Science
0036-8075, 283
, pp. 661
–663
.19.
Bullen
, D.
, Wang
, X.
, Zou
, J.
, Chung
, S.
, Mirkin
, C. A.
, and Liu
, C.
, 2004, “Design, Fabrication, and Characterization of Thermally Actuated Probe Arrays for Dip Pen Nanolithography
,” J. Microelectromech. Syst.
1057-7157, 13
(4
), pp. 594
–602
.20.
Bullen
, D.
, and Liu
, C.
, 2006, “Electrostatically Actuated Dip Pen Nanolithography Probe Arrays
,” Sens. Actuators, A
0924-4247, 125
(2
), pp. 504
–511
.21.
Salaita
, K.
, Wang
, Y.
, and Mirkin
, C. A.
, 2007, “Applications of Dip-Pen Nanolithography
,” Nat. Nanotechnol.
1748-3387, 2
(3
), pp. 145
–155
.22.
Bullen
, D.
, Chung
, S. W.
, Wang
, X.
, Zou
, J.
, and Mirkin
, C. A.
, 2004, “Parallel Dip-Pen Nanolithography With Arrays of Individually Addressable Cantilevers
,” Appl. Phys. Lett.
0003-6951, 84
(5
), pp. 789
–791
.23.
Li
, S.
, Liu
, C.
, and Wang
, X.
, 2006, “Multifunctional Probe Array and Local Vapor Inking Chip for Scanning Probe Nanolithography
,” Sixth IEEE Conference on Nanotechnology, IEEE-NANO 2006
, Vol. 2
, pp. 551
–554
.24.
Wang
, X.
, Bullen
, D.
, Zou
, J.
, Liu
, C.
, and Mirkin
, C. A.
, 2004, “Thermally Actuated Probe Array for Parallel Dip-Pen Nanolithography
,” J. Vac. Sci. Technol. B
1071-1023, 22
, pp. 2563
–2567
.25.
Salaita
, K.
, Wang
, J.
, Fragala
, J.
, Vega
, R. A.
, Liu
, A. Q.
, and Mirkin
, C. A.
, 2006, “Massively Parallel Dip-Pen Nanolithography With 55 000-Pen Two-Dimensional Arrays
,” Angew. Chem., Int. Ed.
1433-7851, 45
(43
), pp. 7220
–7223
.26.
Dario
, P.
, Carrozza
, M. C.
, Benvenuto
, A.
, and Menciassi
, A.
, 2000, “Micro-Systems in Biomedical Applications
,” J. Micromech. Microeng.
0960-1317, 10
(2
), pp. 235
–244
.27.
Du
, S. E.
, Cui
, H.
, and Zhu
, Z.
, 2006, “Review of Nanomanipulators for Nanomanufacturing
,” International Journal of Nanomanufacturing
, 1
(1
), pp. 83
–104
.28.
Shibata
, T.
, Yamanaka
, S.
, Kato
, N.
, Kawashima
, T.
, Nomura
, M.
, Mineta
, T.
, and Makino
, E.
, 2009, “Fabrication of Micromanipulator Array for Cell Patterning
,” Microelectron. Eng.
0167-9317, 86
(4–6
), pp. 1439
–1442
.29.
Alonso
, J. L.
, and Goldmann
, W. H.
, 2003, “Feeling the Forces: Atomic Force Microscopy in Cell Biology
,” Life Sci.
0024-3205, 72
(23
), pp. 2553
–2560
.30.
Fatikow
, S.
, and Eichhorn
, V.
, 2008, “Nanohandling Automation: Trends and Current Developments
,” Proc. Inst. Mech. Eng., Part C: J. Mech. Eng. Sci.
0954-4062, 222
(7
), pp. 1353
–1369
.31.
De Vries
, A. H. B.
, Krenn
, B. E.
, Van Driel
, R.
, and Kanger
, J. S.
, 2005, “Micro Magnetic Tweezers for Nanomanipulation Inside Live Cells
,” Biophys. J.
0006-3495, 88
(3
), pp. 2137
–2144
.32.
Inoue
, K.
, Tanikawa
, T.
, and Arai
, T.
, 2008, “Micro-Manipulation System With a Two-Fingered Micro-Hand and Its Potential Application in Bioscience
,” J. Biotechnol.
0168-1656, 133
(2
), pp. 219
–224
.33.
Bell
, D. J.
, Lu
, T. J.
, Fleck
, N. A.
, and Spearing
, S. M.
, 2005, “MEMS Actuators and Sensors: Observations on Their Performance and Selection for Purpose
,” J. Micromech. Microeng.
0960-1317, 15
(7
), pp. S153
–S164
.34.
Hubbard
, N. B.
, Culpepper
, M. L.
, and Howell
, L. L.
, 2006, “Actuators for Micropositioners and Nanopositioners
,” Appl. Mech. Rev.
0003-6900, 59
(6
), pp. 324
–334
.35.
Leang
, K. K.
, Zou
, Q.
, and Devasia
, S.
, 2009, “Feedforward Control of Piezoactuators in Atomic Force Microscope Systems: Inversion-Based Compensation for Dynamics and Hysteresis
,” IEEE Trans. Control Syst. Technol.
1063-6536, 19
(1
), pp. 70
–82
.36.
Muralt
, P.
, 2008, “Recent Progress in Materials Issues for Piezoelectric MEMS
,” J. Am. Ceram. Soc.
0002-7820, 91
(5
), pp. 1385
–1396
.37.
Jeon
, C. S.
, Park
, J. S.
, Lee
, S. Y.
, and Moon
, C. W.
, 2007, “Fabrication and Characteristics of Out-of-Plane Piezoelectric Microgrippers Using MEMS Processes
,” Thin Solid Films
0040-6090, 515
(12
), pp. 4901
–4904
.38.
Bechtold
, T.
, Rudnyi
, E.
, and Korvink
, J.
, 2005, “Dynamic Electro-Thermal Simulation of Microsystems—A Review
,” J. Micromech. Microeng.
0960-1317, 15
(11
), pp. R17
–R31
.39.
Comtois
, J. H.
, and Bright
, V. M.
, 1997, “Applications for Surface-Micromachined Polysilicon Thermal Actuators and Arrays
,” Sens. Actuators, A
0924-4247, 58
(1
), pp. 19
–25
.40.
Greitmann
, G.
, and Buser
, R. A.
, 1996, “Tactile Microgripper for Automated Handling of Microparts
,” Sens. Actuators, A
0924-4247, 53
(1–3
), pp. 410
–415
.41.
Geisberger
, A.
, and Sarkar
, N.
, 2006, MEMS/NEMS: Techniques in Microelectrothermal Actuator and Their Applications
, Springer
, New York
.42.
Imamura
, T.
, Katayama
, M.
, Ikegawa
, Y.
, Ohwe
, T.
, Koishi
, R.
, and Koshikawa
, T.
, 1998, “MEMS-Based Integrated Head/Actuator/Slider for Hard Disk Drives
,” IEEE/ASME Trans. Mechatron.
1083-4435, 3
(3
), pp. 166
–174
.43.
Andersen
, K. N.
, Petersen
, D. H.
, Carlson
, K.
, Molhave
, K.
, Sardan
, O.
, Horsewell
, A.
, Eichhorn
, V.
, Fatikow
, S.
, and Boggild
, P.
, 2009, “Multimodal Electrothermal Silicon Microgrippers for Nanotube Manipulation
,” IEEE Trans. Nanotechnol.
1536-125X, 8
(1
), pp. 76
–85
.44.
Chang
, J.
, Min
, B.
, Kim
, J.
, and Lin
, L.
, 2009, “Bimorph Nano Actuators Synthesized by Focused Ion Beam Chemical Vapor Deposition
,” Microelectron. Eng.
0167-9317, 86
(11
), pp. 2364
–2368
.45.
Mølhave
, K.
, Wich
, T.
, Kortschack
, A.
, and Bøggild
, P.
, 2006, “Pick-and-Place Nanomanipulation Using Microfabricated Grippers
,” Nanotechnology
0957-4484, 17
(10
), pp. 2434
–2441
.46.
Petrina
, A.
, and Petrin
, A.
, 2008, “On the Question of Information Processing in Nanomanipulation Tasks
,” Automatic Documentation and Mathematical Linguistics
, 42
(2
), pp. 136
–142
.47.
Mølhave
, K.
, and Hansen
, O.
, 2005, “Electro-Thermally Actuated Microgrippers With Integrated Force-Feedback
,” J. Micromech. Microeng.
0960-1317, 15
(6
), pp. 1265
–1270
.48.
Krecinic
, F.
, Duc
, T. C.
, Lau
, G. K.
, and Sarro
, P. M.
, 2008, “Finite Element Modelling and Experimental Characterization of an Electro-Thermally Actuated Silicon-Polymer Microgripper
,” J. Micromech. Microeng.
0960-1317, 18
(6
), p. 064007
.49.
Prasanna
, S.
, and Spearing
, S. M.
, 2007, “Material Selection and Design of Microelectrothermal Bimaterial Actuators
,” J. Microelectromech. Syst.
1057-7157, 16
(2
), pp. 248
–259
.50.
Srikar
, V. T.
, and Spearing
, S. M.
, 2003, “Materials Selection for Microfabricated Electrostatic Actuators
,” Sens. Actuators, A
0924-4247, 102
(3
), pp. 279
–285
.51.
Zhou
, Q.
, Chang
, B.
, and Koivo
, H. N.
, 2004, “Ambient Environmental Effects in Micro/Nano Handling
,” Fourth International Workshop on Microfactories-IWMF
, Shanghai, China, pp. 146
–151
.52.
Chen
, S. -C.
, and Culpepper
, M. L.
, 2006, “Design of a Six-Axis Micro-Scale Nanopositioner-[mu]HexFlex
,” Precis. Eng.
0141-6359, 30
(3
), pp. 314
–324
.53.
Hikihara
, T.
, 2009, Applications of Nonlinear Dynamics: Dynamics in Manipulation and Actuation of Nano-Particles
, Springer
, Berlin, Heidelberg
.54.
Lee
, C. C.
, and Hsu
, W.
, 2003, “Optimization of an Electro-Thermally and Laterally Driven Microactuator
,” Microsyst. Technol.
0946-7076, 9
(5
), pp. 331
–334
.55.
Guckel
, H.
, Klein
, J.
, Christenson
, T.
, Skrobis
, K.
, Laudon
, M.
, and Lovell
, E. G.
, 1992, “Thermo-Magnetic Metal Flexure Actuators
,” Fifth Technical Digest, IEEE Solid-State Sensor and Actuator Workshop
, pp. 73
–75
.56.
Huang
, Q.
, and Lee
, N. K. S.
, 1999, “Analysis and Design of Polysilicon Thermal Fexure Actuator
,” J. Micromech. Microeng.
0960-1317, 9
, pp. 64
–70
.57.
Hickey
, R.
, Kujath
, M.
, and Hubbard
, T.
, 2002, “Heat Transfer Analysis and Optimization of Two-Beam Microelectromechanical Thermal Actuators
,” J. Vac. Sci. Technol. A
0734-2101, 20
(3
), pp. 971
–974
.58.
Kolesar
, E. S.
, Allen
, P. B.
, Howard
, J. T.
, Wilken
, J. M.
, and Boydston
, N.
, 1999, “Thermally-Actuated Cantilever Beam for Schieving Large In-Plane Mechanical Deflections
,” Thin Solid Films
0040-6090, 355–356
, pp. 295
–302
.59.
Chen
, R. S.
, Kung
, C.
, and Lee
, G. -B.
, 2002, “Analysis of the Optimal Dimension on the Electrothermal Microactuator
,” J. Micromech. Microeng.
0960-1317, 12
(3
), pp. 291
–296
.60.
Lee
, J. -S.
, Park
, D. S.-W.
, Nallani
, A. K.
, Lee
, G. -S.
, and Lee
, J. -B.
, 2005, “Sub-Micron Metallic Electrothermal Actuators
,” J. Micromech. Microeng.
0960-1317, 15
(2
), pp. 322
–327
.61.
Kolesar
, E. S.
, Ko
, S. Y.
, Howard
, J. T.
, Allen
, P. B.
, Wilken
, J. M.
, Boydston
, N. C.
, Ruff
, M. D.
, and Wilks
, R. J.
, 2000, “In-Plane Tip Deflection and Force Achieved With Asymmetrical Polysilicon Electrothermal Microactuators
,” Thin Solid Films
0040-6090, 377–378
, pp. 719
–726
.62.
Moulton
, T.
, and Ananthasuresh
, G.
, 2001, “Micromechanical Devices With Embedded Electro-Thermal Compliant Actuation
,” Sens. Actuators, A
0924-4247, 90
(1–2
), pp. 38
–48
.63.
Yan
, D.
, Khajepour
, A.
, and Mansour
, R.
, 2003, “Modeling of Two-Hot-Arm Horizontal Thermal Actuator
,” J. Micromech. Microeng.
0960-1317, 13
(2
), pp. 312
–322
.64.
Li
, L.
, and Uttamchandani
, D.
, 2004, “Modified Asymmetric Micro-Electrothermal Actuator: Analysis and Experimentation
,” J. Micromech. Microeng.
0960-1317, 14
(12
), pp. 1734
–1741
.65.
Henneken
, V. A.
, Tichem
, M.
, and Sarro
, P. M.
, 2008, “Improved Thermal U-Beam Actuators for Micro-Assembly
,” Sens. Actuators, A
0924-4247, 142
(1
), pp. 298
–305
.66.
Tsai
, L. -N.
, Shen
, G. -R.
, Cheng
, Y. -T.
, and Hsu
, W.
, 2006, “Performance Improvement of an Electrothermal Microactuator Fabricated Using Ni-Diamond Nanocomposite
,” J. Microelectromech. Syst.
1057-7157, 15
(1
), pp. 149
–158
.67.
Carlson
, K.
, Andersen
, K. N.
, Eichhorn
, V.
, Petersen
, D. H.
, Molhave
, K.
, Bu
, I. Y. Y.
, Teo
, K. B. K.
, Milne
, W. I.
, Fatikow
, S.
, and Boggild
, P.
, 2007, “A Carbon Nanofibre Scanning Probe Assembled Using an Electrothermal Microgripper
,” Nanotechnology
0957-4484, 18
(34
), p. 345501
.68.
Atre
, A.
, 2006, “Analysis of Out-of-Plane Thermal Microactuators
,” J. Micromech. Microeng.
0960-1317, 16
(2
), pp. 205
–213
.69.
Yan
, D.
, Khajepour
, A.
, and Mansour
, R.
, 2004, “Design and Modeling of a MEMS Bidirectional Vertical Thermal Actuator
,” J. Micromech. Microeng.
0960-1317, 14
(7
), pp. 841
–850
.70.
Elbuken
, C.
, Topaloglu
, N.
, Nieva
, P.
, Yavuz
, M.
, and Huissoon
, J.
, 2009, “Modeling and Analysis of a 2-DOF Bidirectional Electro-Thermal Microactuator
,” Microsyst. Technol.
0946-7076, 15
(5
), pp. 713
–722
.71.
Chen
, S. C.
, and Culpepper
, M. L.
, 2006, “Design of Contoured Microscale Thermomechanical Actuators
,” J. Microelectromech. Syst.
1057-7157, 15
(5
), pp. 1226
–1234
.72.
Dan
, Z.
, Guifu
, D.
, Lida
, Z.
, and Jifeng
, C.
, 2008, “An Out-of-Plane Electro-Thermal Polymer Actuator
,” Proceedings of the Third IEEE International Conference on Nano/Micro Engineered and Molecular Systems
, Sanya, China, pp. 647
–650
.73.
Popa
, D. O.
, Kang
, B. H.
, Wen
, J. T.
, Stephanou
, H. E.
, Skidmore
, G.
, and Geisberger
, A.
, 2003, “Dynamic Modeling and Input Shaping of Thermal Bimorph MEMS Actuators
,” Proceedings of the ICRA’03 IEEE International Conference on Robotics and Automation
, Taipei, Taiwan, Vol. 1
, pp. 1470
–1475
.74.
Ouyang
, P.
, Tjiptoprodjo
, R.
, Zhang
, W.
, and Yang
, G.
, 2008, “Micro-Motion Devices Technology: The State of Arts Review
,” Int. J. Adv. Manuf. Technol.
0268-3768, 38
(5–6
), pp. 463
–478
.75.
Ananthasuresh
, G. K.
, and Howell
, L. L.
, 2005, “Mechanical Design of Compliant Microsystems—A Perspective and Prospects
,” ASME J. Mech. Des.
0161-8458, 127
(4
), pp. 736
–738
.76.
Tsai
, Y. -C.
, Lei
, S. H.
, and Sudin
, H.
, 2005, “Design and Analysis of Planar Compliant Microgripper Based on Kinematic Approach
,” J. Micromech. Microeng.
0960-1317, 15
(1
), pp. 143
–156
.77.
Jonsmann
, J.
, Sigmund
, O.
, and Bouwstra
, S.
, 1999, “Compliant Electro-thermal Microactuators
,” 12th IEEE International Conference on Micro Electro Mechanical Systems
, pp. 588
–593
.78.
Sigmund
, O.
, 2001, “Design of Multiphysics Actuators Using Topology Optimization—Part I: One-Material Structures
,” Comput. Methods Appl. Mech. Eng.
0045-7825, 190
(49–50
), pp. 6577
–6604
.79.
Sardan
, O.
, Petersen
, D. H.
, Mølhave
, K.
, Sigmund
, O.
, and Bøggild
, P.
, 2008, “Topology Optimized Electrothermal Polysilicon Microgrippers
,” Microelectron. Eng.
0167-9317, 85
(5–6
), pp. 1096
–1099
.80.
Rubio
, W. M.
, Silva
, E. C. N.
, Bordatchev
, E. V.
, and Zeman
, M. J. F.
, 2008, “Topology Optimized Design, Microfabrication and Characterization of Electro-Thermally Driven Microgripper
,” J. Intell. Mater. Syst. Struct.
1045-389X, 20
(6
), pp. 669
–681
.81.
Sardan
, O.
, Petersen
, D. H.
, Sigmund
, O.
, and Boggild
, P.
, 2008, “Simulation of Topology Optimized Electrothermal Microgrippers
,” COMSOL Conference
, Hannover, Germany pp. 1
–20
.82.
Nguyen
, N. -T.
, Ho
, S. -S.
, and Low
, C. L.-N.
, 2004, “A Polymeric Microgripper With Integrated Thermal Actuators
,” J. Micromech. Microeng.
0960-1317, 14
(7
), pp. 969
–974
.83.
Solano
, B.
, and Wood
, D.
, 2007, “Design and Testing of a Polymeric Microgripper for Cell Manipulation
,” Microelectron. Eng.
0167-9317, 84
(5–8
), pp. 1219
–1222
.84.
Duc
, T. C.
, Lau
, G. -K.
, and Sarro
, P. M.
, 2008, “Polymeric Thermal Microactuator With Embedded Silicon Skeleton: Part II—Fabrication, Characterization, and Application for 2-DOF Microgripper
,” J. Microelectromech. Syst.
1057-7157, 17
(4
), pp. 823
–831
.85.
Lau
, E. K.
, Goosen
, J. F. L.
, Van Keulen
, F.
, Duc
, T. C.
, and Sarro
, P. M.
, 2008, “Polymeric Thermal Microactuator With Embedded Silicon Skeleton: Part I—Design and Analysis
,” J. Microelectromech. Syst.
1057-7157, 17
(4
), pp. 809
–822
.86.
Elata
, D.
, and Leus
, V.
, 2005, “How Slender Can Comb-Drive Fingers Be?
,” J. Micromech. Microeng.
0960-1317, 15
(5
), pp. 1055
–1059
.87.
Zhou
, G.
, and Dowd
, P.
, 2003, “Tilted Folded-Beam Suspension for Extending the Stable Travel Range of Comb-Drive Actuators
,” J. Micromech. Microeng.
0960-1317, 13
(2
), pp. 178
–183
.88.
Hirano
, T.
, Furuhata
, T.
, Gabriel
, K. J.
, and Fujita
, H.
, 1992, “Design, Fabrication, and Operation of Submicron Gap Comb-Drive Microactuators
,” J. Microelectromech. Syst.
1057-7157, 1
(1
), pp. 52
–59
.89.
Hou
, M. T.-K.
, Huang
, G. K.-W.
, Huang
, J. -Y.
, Liao
, K. -M.
, Chen
, R.
, and Yeh
, J. -L. A.
, 2006, “Extending Displacements of Comb Drive Actuators by Adding Secondary Comb Electrodes
,” J. Micromech. Microeng.
0960-1317, 16
(4
), pp. 684
–691
.90.
Chen
, C.
, and Lee
, C.
, 2004, “Design and Modeling for Comb Drive Actuator With Enlarged Static Displacement
,” Sens. Actuators, A
0924-4247, 115
(2–3
), pp. 530
–539
.91.
Legtenberg
, R.
, Groeneveld
, A. W.
, and Elwenspoek
, M.
, 1996, “Comb-Drive Actuators for Large Displacements
,” J. Micromech. Microeng.
0960-1317, 6
(3
), pp. 320
–329
.92.
Dai
, W.
, Lian
, K.
, and Wang
, W.
, 2007, “Design and Fabrication of a SU-8 Based Electrostatic Microactuator
,” Microsyst. Technol.
0946-7076, 13
(3–4
), pp. 271
–277
.93.
Grade
, J. D.
, Jerman
, H.
, and Kenny
, T. W.
, 2003, “Design of Large Deflection Electrostatic Actuators
,” J. Microelectromech. Syst.
1057-7157, 12
(3
), pp. 335
–343
.94.
Ye
, W.
, and Mukherjee
, S.
, 1999, “Optimal Shape Design of Three-Dimensional MEMS With Applications to Electrostatic Comb Drives
,” Int. J. Numer. Methods Eng.
0029-5981, 45
(2
), pp. 175
–194
.95.
Sun
, L.
, Wang
, J.
, Rong
, W.
, Li
, X.
, and Bao
, H.
, 2008, “A Silicon Integrated Micro Nano-Positioning XY-Stage for Nano-Manipulation
,” J. Micromech. Microeng.
0960-1317, 18
(12
), p. 125004
.96.
Chiou
, J. -C.
, Lin
, Y. -J.
, and Kuo
, C. -F.
, 2008, “Extending the Traveling Range With a Cascade Electrostatic Comb-Drive Actuator
,” J. Micromech. Microeng.
0960-1317, 18
(1
), p. 015018
.97.
Liu
, X.
, Kim
, K.
, and Sun
, Y.
, 2007, “A MEMS Stage for 3-Axis Nanopositioning
,” J. Micromech. Microeng.
0960-1317, 17
(9
), pp. 1796
–1802
.98.
Gu
, L.
, Li
, X.
, Bao
, H.
, Liu
, B.
, Wang
, Y.
, Liu
, M.
, Yang
, Z.
, and Cheng
, B.
, 2006, “Single-Wafer-Processed Nano-Positioning XY-stages With Trench-Sidewall Micromachining Technology
,” J. Micromech. Microeng.
0960-1317, 16
(7
), pp. 1349
–1357
.99.
Dong
, J.
, Mukhopadhyay
, D.
, and Ferreira
, P. M.
, 2007, “Design, Fabrication and Testing of a Silicon-on-Insulator (SOI) MEMS Parallel Kinematics XY Stage
,” J. Micromech. Microeng.
0960-1317, 17
(6
), pp. 1154
–1161
.100.
Mukhopadhyay
, D.
, Dong
, J.
, Pengwang
, E.
, and Ferreira
, P.
, 2008, “A SOI-MEMS-Based 3-DOF Planar Parallel-Kinematics Nanopositioning Stage
,” Sens. Actuators, A
0924-4247, 147
(1
), pp. 340
–351
.101.
Yao
, Q.
, Dong
, J.
, and Ferreira
, P. M.
, 2008, “A Novel Parallel-Kinematics Mechanisms for Integrated, Multi-Axis Nanopositioning: Part 1. Kinematics and Design for Fabrication
,” Precis. Eng.
0141-6359, 32
(1
), pp. 7
–19
.102.
Liu
, X.
, Tong
, J.
, and Sun
, Y.
, 2007, “A Millimeter-Sized Nanomanipulator With Sub-Nanometer Positioning Resolution and Large Force Output
,” Smart Mater. Struct.
0964-1726, 16
(5
), pp. 1742
–1750
.103.
Volland
, B. E.
, Heerlein
, H.
, and Rangelow
, I. W.
, 2002, “Electrostatically Driven Microgripper
,” Microelectron. Eng.
0167-9317, 61–62
, pp. 1015
–1023
.104.
Chang
, H. -C.
, Tsai
, J. M.-L.
, Tsai
, H. -C.
, and Fang
, W.
, 2006, “Design, Fabrication, and Testing of a 3-DOF HARM Micromanipulator on (1 1 1) Silicon Substrate
,” Sens. Actuators, A
0924-4247, 125
(2
), pp. 438
–445
.105.
Beyeler
, F.
, Neild
, A.
, Oberti
, S.
, Bell
, D. J.
, and Sun
, Y.
, 2007, “Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic field
,” J. Microelectromech. Syst.
1057-7157, 16
(1
), pp. 7
–15
.106.
Qiao
, D. -Y.
, Yuan
, W. -Z.
, and Li
, X. -Y.
, 2007, “A Two-Beam Method for Extending the Working Range of Electrostatic Parallel-Plate Micro-Actuators
,” J. Electrost.
0304-3886, 65
(4
), pp. 256
–262
.107.
Hung
, E. S.
, and Senturia
, S. D.
, 1999, “Extending the Travel Range of Analog-Tuned Electrostatic Actuators
,” J. Microelectromech. Syst.
1057-7157, 8
(4
), pp. 497
–505
.108.
Chan
, E. K.
, and Dutton
, R. W.
, 2000, “Electrostatic Micromechanical Actuator With Extended Range of Travel
,” J. Microelectromech. Syst.
1057-7157, 9
(3
), pp. 321
–328
.109.
Castañer
, L.
, Pons
, J.
, Nadal-Guardia
, R.
, and Rodríguez
, A.
, 2001, “Analysis of the Extended Operation Range of Electrostatic Actuators by Current-Pulse Drive
,” Sens. Actuators, A
0924-4247, 90
(3
), pp. 181
–190
.110.
Rocha
, L. A.
, Cretu
, E.
, and Wolffenbuttel
, R. F.
, 2006, “Using Dynamic Voltage Drive in a Parallel-Plate Electrostatic Actuator for Full-Gap Travel Range and Positioning
,” J. Microelectromech. Syst.
1057-7157, 15
(1
), pp. 69
–83
.111.
Li
, L.
, Brown
, J. G.
, and Uttamchandani
, D.
, 2002, “Study of Scratch Drive Actuator Force Characteristics
,” J. Micromech. Microeng.
0960-1317, 12
(6
), pp. 736
–741
.112.
Kanamori
, Y.
, Yahagi
, H.
, and Hane
, K.
, 2006, “A Microtranslation Table With Scratch-Drive Atuators Fabricated From Silicon-on-Insulator Wafer
,” Sens. Actuators, A
0924-4247, 125
(2
), pp. 451
–457
.113.
Kuang
, Y.
, Huang
, Q. A.
, and Lee
, N. K. S.
, 2002, “Numerical Simulation of a Polysilicon Thermal Flexure Actuator
,” Microsyst. Technol.
0946-7076, 8
(1
), pp. 17
–21
.114.
Li
, R.
, Huang
, Q. -A.
, and Li
, W.
, 2009, “A Nodal Analysis Model for the Out-of-Plane Beamshape Electrothermal Microactuator
,” Microsyst. Technol.
0946-7076, 15
(2
), pp. 217
–225
.115.
Enikov
, E. T.
, Kedar
, S. S.
, and Lazarov
, K. V.
, 2005, “Analytical Model for Analysis and Design of V-Shaped Thermal Microactuators
,” J. Microelectromech. Syst.
1057-7157, 14
(4
), pp. 788
–798
.116.
Lin
, L.
, and Chiao
, M.
, 1996, “Electrothermal Responses of Lineshape Microstructures
,” Sens. Actuators, A
0924-4247, 55
(1
), pp. 35
–41
.117.
Mayyas
, M.
, and Stephanou
, H.
, 2009, “Electrothermoelastic Modeling of MEMS Gripper
,” Microsyst. Technol.
0946-7076, 15
(4
), pp. 637
–646
.118.
Hickey
, R.
, Sameoto
, D.
, Hubbard
, T.
, and Kujath
, M.
, 2003, “Time and Frequency Response of Two-Arm Micromachined Thermal Actuators
,” J. Micromech. Microeng.
0960-1317, 13
(1
), pp. 40
–46
.119.
Geisberger
, A. A.
, Sarkar
, N.
, Ellis
, M.
, and Skidmore
, G. D.
, 2003, “Electrothermal Properties and Modeling of Polysilicon Microthermal Actuators
,” J. Microelectromech. Syst.
1057-7157, 12
(4
), pp. 513
–523
.120.
Liu
, C.
, 2006, Foundations of MEMS
, Pearson/Prentice-Hall
, Upper Saddle River, NJ
.121.
Atre
, A.
, 2007, “Effect of Shape Factors and Material Property Variations on Modeling the Response of Thermal Microactuators
,” Sens. Actuators, A
0924-4247, 134
(1
), pp. 69
–76
.122.
Mankame
, N. D.
, and Ananthasuresh
, G. K.
, 2001, “Comprehensive Thermal Modelling and Characterization of an Electro-Thermal-Compliant Microactuator
,” J. Micromech. Microeng.
0960-1317, 11
(5
), pp. 452
–462
.123.
Mills
, A.
, 1999, Basic Heat and Mass Transfer
, Prentice-Hall
, Englewood Cliffs, NJ
.124.
Atre
, A.
, and Boedo
, S.
, 2004, “Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators
,” Proceedings of the Modeling and Simulation of Microsystems
, NSTI-Nanotech 2004, Vol. 2
, pp. 263
–267
.125.
Sundararajan
, S.
, and Bhushan
, B.
, 2002, “Development of AFM-based Techniques to Measure Mechanical Properties of Nanoscale Structures
,” Sens. Actuators, A
0924-4247, 101
(3
), pp. 338
–351
.126.
Godoy
, P. H. D.
, and Silva
, E. C. N.
, 2007, “Aspects of Fabrication and Characterization of Electro-Thermal Microactuators
,” J. Braz. Soc. Mech. Sci.
0100-7386, 29
(1
), pp. 26
–33
.127.
Lee
, K. B.
, Pisano
, A. P.
, and Lin
, L.
, 2007, “Nonlinear Behaviors of a Comb Drive Actuator Under Electrically Induced Tensile and Compressive Stresses
,” J. Micromech. Microeng.
0960-1317, 17
(3
), pp. 557
–566
.128.
Leus
, V.
, and Elata
, D.
, 2004, “Fringing Field Effect in Electrostatic Actuators
,” Technion-Israel Institute of Technology Technical Report No. ETR-2004-2.129.
Zhu
, G.
, Penet
, J.
, and Saydy
, L.
, 2007, “Modeling and Control of Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties
,” ASME J. Dyn. Syst., Meas., Control
0022-0434, 129
(6
), pp. 786
–794
.130.
Elata
, D.
, and Bamberger
, H.
, 2006, “On the Dynamic Pull-in of Electrostatic Actuators With Multiple Degrees of Freedom and Multiple Voltage Sources
,” J. Microelectromech. Syst.
1057-7157, 15
(1
), pp. 131
–140
.131.
Lin
, W. -H.
, and Zhao
, Y. -P.
, 2005, “Nonlinear Behavior for Nanoscale Electrostatic Actuators With Casimir Force
,” Chaos, Solitons Fractals
0960-0779, 23
(5
), pp. 1777
–1785
.132.
Qinghua
, L.
, Yanbin
, F.
, and Xianmin
, Z.
, 2008, “In-Plane Micro-Motion Measurement With High Accuracy Based on Computer Microvision
,” Seventh World Congress on Intelligent Control and Automation, WCICA 2008
, pp. 2365
–2370
.133.
Zhong
, Y.
, Zhang
, G.
, Leng
, C.
, and Zhang
, T.
, 2007, “A Differential Laser Doppler System for One-Dimensional In-Plane Motion Measurement of MEMS
,” Measurement
0263-2241, 40
(6
), pp. 623
–627
.134.
Park
, H.
, Kwon
, S.
, and Kim
, S.
, 2009, “Quantitative Displacement Measurement of a Nanotube Cantilever With Nanometer Accuracy Using Epifluorescence Microscopy
,” Rev. Sci. Instrum.
0034-6748, 80
(5
), p. 053703
.135.
Lai
, Y.
, Mcdonald
, J.
, Kujath
, M.
, and Hubbard
, T.
, 2004, “Force, Deflection and Power Measurements of Toggled Microthermal Actuators
,” J. Micromech. Microeng.
0960-1317, 14
(1
), pp. 49
–56
.136.
Sun
, Y.
, and Nelson
, B. J.
, 2007, “MEMS Capacitive Force Sensors for Cellular and Flight Biomechanics
,” Biomed. Mater.
, 2
(1
), pp. S16
–S22
.137.
Wittwer
, J. W.
, Baker
, M. S.
, and Howell
, L. L.
, 2006, “Simulation, Measurement, and Asymmetric Buckling of Thermal Microactuators
,” Sens. Actuators, A
0924-4247, 128
(2
), pp. 395
–401
.138.
Tokunaga
, M.
, Aoki
, T.
, Hiroshima
, M.
, Kitamura
, K.
, and Yanagida
, T.
, 1997, “Subpiconewton Intermolecular Force Microscopy
,” Biochem. Biophys. Res. Commun.
0006-291X, 231
(3
), pp. 566
–569
.139.
Teyssieux
, D.
, Thiery
, L.
, and Cretin
, B.
, 2007, “Near-Infrared Thermography Using a Charge-Coupled Device Camera: Application to Microsystems
,” Rev. Sci. Instrum.
0034-6748, 78
(3
), p. 034902
.140.
Kim
, S. H.
, Noh
, J.
, Jeon
, M. K.
, Kim
, K. W.
, Lee
, L. P.
, and Woo
, S. I.
, 2006, “Micro-Raman Thermometry for Measuring the Temperature Distribution Inside the Microchannel of a Polymerase Chain Reaction Chip
,” J. Micromech. Microeng.
0960-1317, 16
(3
), pp. 526
–530
.141.
Serrano
, J. R.
, and Kearney
, S. P.
, 2008, “Time-Resolved Micro-Raman Thermometry for Microsystems in Motion
,” ASME J. Heat Transfer
0022-1481, 130
(12
), p. 122401
.142.
Jalili
, N.
, and Laxminarayana
, K.
, 2004, “A Review of Atomic Force Microscopy Imaging Systems: Application to Molecular Metrology and Biological Sciences
,” Mechatronics
0957-4158, 14
(8
), pp. 907
–945
.143.
Madou
, M. J.
, 2002, Fundamentals of Microfabrication: The Science of Miniaturization
, CRC
, Boca Raton, FL
.144.
Judy
, J. W.
, 2001, “Microelectromechanical Systems (MEMS): Fabrication, Design and Applications
,” Smart Mater. Struct.
0964-1726, 10
(6
), pp. 1115
–1134
.145.
Gad-El-Hak
, M.
, 2006, MEMS: Introduction and Fundamentals
, CRC
, Boca Raton, FL
/Taylor & Francis
, New York
.146.
Maleville
, C.
, and Mazuré
, C.
, 2004, “Smart-Cut® Technology: From 300 mm Ultrathin SOI Production to Advanced Engineered Substrates
,” Solid-State Electron.
0038-1101, 48
(6
), pp. 1055
–1063
.147.
Chen
, Y.
, and Pépin
, A.
, 2001, “Nanofabrication: Conventional and Nonconventional Methods
,” Electrophoresis
0173-0835, 22
(2
), pp. 187
–207
.148.
Morton
, K. J.
, Nieberg
, G.
, Bai
, S.
, and Chou
, S. Y.
, 2008, “Wafer-Scale Patterning of Sub-40 nm Diameter and High Aspect Ratio (>50:1) Silicon Pillar Arrays by Nanoimprint and Etching
,” Nanotechnology
0957-4484, 19
(34
), p. 345301
.149.
Shedd
, G. M.
, and Russell
, P.
, 1990, “The Scanning Tunneling Microscope as a Tool for Nanofabrication
,” Nanotechnology
0957-4484, 1
(1
), pp. 67
–80
.150.
Binnig
, G.
, Quate
, C. F.
, and Gerber
, C.
, 1986, “Atomic Force Microscope
,” Phys. Rev. Lett.
0031-9007, 56
(9
), pp. 930
–933
.151.
Huo
, F.
, Zheng
, Z.
, Zheng
, G.
, Giam
, L. R.
, Zhang
, H.
, and Mirkin
, C. A.
, 2008, “Polymer Pen Lithography
,” Science
0036-8075, 321
, pp. 1658
–1660
.152.
Cheng
, C. -H.
, Chan
, C. -K.
, and Lai
, G. -J.
, 2009, “Optimal Design of Al/Si Bimorph Electro-Thermal Microactuator by Integrating Finite-Element Code With Optimization Method
,” Sens. Actuators, A
0924-4247, 151
(1
), pp. 53
–63
.153.
Choi
, H. -S.
, Lee
, D. -C.
, Kim
, S. -S.
, and Han
, C. -S.
, 2005, “The Development of a Microgripper With a Perturbation-Based Configuration Design Method
,” J. Micromech. Microeng.
0960-1317, 15
(6
), pp. 1327
–1333
.154.
Wang
, N. F.
, and Tai
, K.
, 2008, “Design of Grip-and-Move Manipulators Using Symmetric Path Generating Compliant Mechanisms
,” ASME J. Mech. Des.
0161-8458, 130
(11
), p. 112305
.155.
Sigmund
, O.
, 2009, “Manufacturing Tolerant Topology Optimization
,” Acta Mech. Sin.
0459-1879, 25
(2
), pp. 227
–239
.156.
Maute
, K.
, and Frangopol
, D. M.
, 2003, “Reliability-Based Design of MEMS Mechanisms by Topology Optimization
,” Comput. Struct.
0045-7949, 81
(8–11
), pp. 813
–824
.157.
Du
, Y. -X.
, Chen
, L. -P.
, Tian
, Q. -H.
, and Wu
, Z. -J.
, 2009, “Topology Synthesis of Thermomechanical Compliant Mechanisms With Geometrical Nonlinearities Using Meshless Method
,” Adv. Eng. Software
0965-9978, 40
(5
), pp. 315
–322
.158.
van West
, E.
, Yamamoto
, A.
, and Higuchi
, T.
, 2007, “The Concept of “Haptic Tweezer,” a Non-Contact Object Handling System Using Levitation Techniques and Haptics
,” Mechatronics
0957-4158, 17
(7
), pp. 345
–356
.159.
Lyons
, K.
, and Postek
, M.
, 2008, “Metrology at the Nanoscale: What Are the Grand Challenges?
,” Proc. SPIE
0277-786X, 7042
, pp. 704202.1
–704202.13
.Copyright © 2010
by American Society of Mechanical Engineers
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