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Keywords: batch processing (industrial)
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Journal Articles
Publisher: ASME
Article Type: Introduction
J. Mech. Des. July 2005, 127(4): 736–738.
Published Online: February 14, 2005
...G. K. Ananthasuresh; Larry L. Howell 27 01 2005 14 02 2005 design mechatronics micromechanical devices batch processing (industrial) The field of microsystems, or microelectromechanical systems (MEMS) as it is popularly known, is a truly multidisciplinary area...