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Journal Articles

A Study on Long-Term In Vitro Reliability of Intracochlear Lead-Zirconate-Titanate Microactuators

Yifeng Liu, Chuan Luo, G. Z. Cao, Clifford R. Hume, I. Y. Shen
Journal: Journal of Engineering and Science in Medical Diagnostics and Therapy
Article Type: Research-Article
ASME J of Medical Diagnostics. August 2018, 1(3): 031005.
Paper No: JESMDT-18-1017
DOI: https://doi.org/10.1115/1.4040103
Published Online: May 28, 2018
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Topics: Actuators, Electrodes, Reliability, Failure, Microactuators
Journal Articles

Voltage-Induced Snap-Through of an Asymmetrically Laminated, Piezoelectric, Thin-Film Diaphragm Micro-Actuator—Part 1: Experimental Studies and Mathematical Modeling

W. C. Tai, Chuan Luo, Cheng-Wei Yang, G. Z. Cao, I. Y. Shen
Journal: Journal of Vibration and Acoustics
Article Type: Research-Article
J. Vib. Acoust. October 2018, 140(5): 051005.
Paper No: VIB-17-1335
DOI: https://doi.org/10.1115/1.4039535
Published Online: April 17, 2018
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Topics: Boundary-value problems, Diaphragms (Mechanical devices), Diaphragms (Structural), Displacement, Electric fields, Electrodes, Equations of motion, Laminates, Microactuators, Shells
Journal Articles

Effects of Added Mass on Lead-Zirconate-Titanate Thin-Film Microactuators in Aqueous Environments

Chuan Luo, W. C. Tai, Cheng-Wei Yang, G. Z. Cao, I. Y. Shen
Journal: Journal of Vibration and Acoustics
Article Type: Research-Article
J. Vib. Acoust. December 2016, 138(6): 061015.
Paper No: VIB-15-1150
DOI: https://doi.org/10.1115/1.4034613
Published Online: September 30, 2016
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Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), Fluids, Water, Silicon, Microactuators, Thin films
Proceedings Papers

Effects of Added Mass on Lead-Zirconate-Titanate (PZT) Thin-Film Microactuators in Aqueous Environments

Chuan Luo, Chen-Wei Yang, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2013, Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems, V001T09A006, August 4–7, 2013
Paper No: DETC2013-12043
DOI: https://doi.org/10.1115/DETC2013-12043
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Topics: Microactuators, Thin films, Diaphragms (Mechanical devices), Diaphragms (Structural), Silicon, Probes, Water, Dimensions, Electrodes, Actuators
Proceedings Papers

Effects of Air on Enclosure Design of Lead-Zirconate-Titanate (PZT) Thin-Film Diaphragm Microactuators

Chuan Luo, Kai-Yi Hsiao, Perry Cheung, Howard Lin, A. Q. Shen, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2012, Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference, 41-47, August 12–15, 2012
Paper No: DETC2012-70061
DOI: https://doi.org/10.1115/DETC2012-70061
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Topics: Design, Diaphragms (Mechanical devices), Diaphragms (Structural), Microactuators, Thin films, Cavities, Silicon, Stiffness, Electrodes, Springs
Journal Articles

Measurements of Piezoelectric Coefficient d 33 of Lead Zirconate Titanate Thin Films Using a Mini Force Hammer

Qing Guo, G. Z. Cao, I. Y. Shen
Journal: Journal of Vibration and Acoustics
Article Type: Research-Article
J. Vib. Acoust. February 2013, 135(1): 011003.
Paper No: VIB-11-1084
DOI: https://doi.org/10.1115/1.4006881
Published Online: February 4, 2013
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Topics: Thin films, Finite element analysis, Thick films
Proceedings Papers

Cost-Effective Measurements of Piezoelectric Coefficient d 33 of Thin-Film PZT Using a Mini Force Hammer

Qing Guo, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2011, Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference, 269-277, August 28–31, 2011
Paper No: DETC2011-47512
DOI: https://doi.org/10.1115/DETC2011-47512
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Topics: Hammers, Thin films, Actuators, Boundary-value problems, Disks, Finite element analysis, Microactuators, Modeling, Piezoelectric materials, Piezoelectricity
Proceedings Papers

Measurements of Piezoelectric Constant D 33 of Lead Zirconate Titanate (PZT) Through Use of a Mini Impact Hammer

Qing Guo, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 501-505, August 30–September 2, 2009
Paper No: DETC2009-86157
DOI: https://doi.org/10.1115/DETC2009-86157
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Topics: Hammers, Actuators, Boundary-value problems, Thin films, Circuits, Microactuators, Piezoelectric materials, Sensors, Signal to noise ratio, Stress
Proceedings Papers

Correlation Improvement Between Theoretical and Experimental Results of PZT Thin-Film Membrane Actuators

Cheng-Chun Lee, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 507-512, August 30–September 2, 2009
Paper No: DETC2009-86344
DOI: https://doi.org/10.1115/DETC2009-86344
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Topics: Actuators, Membranes, Thin films, Finite element analysis, Dimensions, Displacement, Finite element model, Residual stresses, Lasers, Materials properties
Proceedings Papers

Actuation Enhancement of PZT Thin-Film Membrane Actuators via Stress Relief Grooves

Cheng-Chun Lee, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 613-617, August 3–6, 2008
Paper No: DETC2008-49283
DOI: https://doi.org/10.1115/DETC2008-49283
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Topics: Actuators, Membranes, Stress, Thin films, Design, Displacement, Film thickness, Finite element analysis, Microactuators, Boundary-value problems
Proceedings Papers

Active Vibration Control of Meso- and Microstructures via Piezoelectric Films

Yi-Chu Hsu, Chia-Che Wu, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2003, Volume 5: 19th Biennial Conference on Mechanical Vibration and Noise, Parts A, B, and C, 1955-1961, September 2–6, 2003
Paper No: DETC2003/VIB-48540
DOI: https://doi.org/10.1115/DETC2003/VIB-48540
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Topics: Vibration control, Thick films, Cantilevers, Silicon, Electrodes, Actuators, Control equipment, Dimensions, Fracture (Materials), Frequency response
Proceedings Papers

Direct Measurements of Transverse Piezoelectric Coefficient e 31 of PZT Thin Films

Chia-Che Wu, Cheng-Chun Lee, G. Z. Cao, I. Y. Shen
Proc. ASME. IMECE2004, Microelectromechanical Systems, 79-83, November 13–19, 2004
Paper No: IMECE2004-59421
DOI: https://doi.org/10.1115/IMECE2004-59421
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Topics: Thin films, Boundary-value problems, Silicon, Calibration, Cantilever beams, Cantilevers, Deflection, Dimensions, Euler-Bernoulli beam theory, Laser Doppler vibrometers
Proceedings Papers

Effects of Corner Frequency on Bandwidth and Resonance Amplitude in Designing PZT Thin-Film Actuators: An Experimental Demonstration

Chia-Che Wu, Cheng-Chun Lee, G. Z. Cao, I. Y. Shen
Proc. ASME. IMECE2005, Design Engineering, Parts A and B, 437-441, November 5–11, 2005
Paper No: IMECE2005-79102
DOI: https://doi.org/10.1115/IMECE2005-79102
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Topics: Actuators, Corners (Structural elements), Design, Resonance, Thin films, Film thickness, Silicon, Capacitance, Circuits, Electrodes
Proceedings Papers

Feasibility Study of Smart PZT Thin-Film Microresonators

Chia-Che Wu, Cheng-Chun Lee, G. Z. Cao, I. Y. Shen
Proc. ASME. IMECE2006, Design Engineering and Computers and Information in Engineering, Parts A and B, 7-11, November 5–10, 2006
Paper No: IMECE2006-13931
DOI: https://doi.org/10.1115/IMECE2006-13931
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Topics: Micromechanical resonators, Thin films, Actuators, Damping, Design, Electrodes, Q-factor, Sensors, Cantilevers, Diaphragms (Mechanical devices)