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Proceedings Papers

A Micro Valve Made of PSPI

Xiaohao Wang, Zhaoying Zhou, Wendong Zhang
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 31-36, November 15–20, 1998
Paper No: IMECE1998-1220
https://doi.org/10.1115/IMECE1998-1220
View Paper titled, A Micro Valve Made of PSPI
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Topics: Valves, Pressure, Flow (Dynamics), Manufacturing, Design, Dimensions, Leakage, Micropumps, Polysilicon, Silicon
Proceedings Papers

Micromachined Pressure Sensor Based on GaAs/AlAs/In x Ga 1−x As Resonant Tunneling Effect

Wendong Zhang, Jian Wang, Chenyang Xue, Jijun Xiong, Jun Liu, Zhaomin Tong
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 451-454, January 10–13, 2007
Paper No: MNC2007-21226
https://doi.org/10.1115/MNC2007-21226
View Paper titled, Micromachined Pressure Sensor Based on GaAs/AlAs/In x Ga 1−x As Resonant Tunneling Effect
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Topics: Gallium arsenide, Micromachining, Pressure sensors, Resonance, Tunnel construction
Proceedings Papers

Testing the MEMS Device’s Internal Structure Topography Based on Transmission and Interference Technique

Chenyang Xue, Fanhua Kong, Lina Zheng, Wendong Zhang, Jijun Xiong, Binzhen Zhang
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 481-484, January 10–13, 2007
Paper No: MNC2007-21281
https://doi.org/10.1115/MNC2007-21281
View Paper titled, Testing the MEMS Device’s Internal Structure Topography Based on Transmission and Interference Technique
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Topics: Microelectromechanical systems, Optical interference, Testing
Proceedings Papers

Research on Micro Accelerometer Array

Jijun Xiong, Haiyang Mao, Wendong Zhang, Dong Xu, Tao Guo
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 517-521, January 10–13, 2007
Paper No: MNC2007-21385
https://doi.org/10.1115/MNC2007-21385
View Paper titled, Research on Micro Accelerometer Array
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Topics: Accelerometers
Proceedings Papers

Design and Experiment for High Overloading Piezoceramics Actuator Based on Adaptive Munition

Yunbo Shi, Haoyu Wang, Jun Liu, Binzhen Zhang, Wendong Zhang
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 95-99, January 10–13, 2007
Paper No: MNC2007-21274
https://doi.org/10.1115/MNC2007-21274
View Paper titled, Design and Experiment for High Overloading Piezoceramics Actuator Based on Adaptive Munition
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Topics: Actuators, Design, Flow (Dynamics), Munitions, Piezoelectric ceramics