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Yuichiro Ezoe
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Journal Articles

Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics

Raul E. Riveros, Hitomi Yamaguchi, Taylor Boggs, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Utako Takagi, Yuichiro Ezoe, Kensuke Ishizu, Teppei Moriyama
Journal: Journal of Manufacturing Science and Engineering
Article Type: Research Papers
J. Manuf. Sci. Eng. October 2012, 134(5): 051001.
https://doi.org/10.1115/1.4006967
Published Online: August 20, 2012
View Article titled, Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics
Open the PDF for Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics in another window
Topics: Annealing, Finishing, Hydrogen, Microelectromechanical systems, Mirrors, Optics, Silicon, Surface roughness, X-ray optics, X-rays
Proceedings Papers

Magnetic Field Assisted Finishing of Silicon MEMS Micro-Pore X-Ray Optics

Raul E. Riveros, Hitomi Yamaguchi, Taylor Boggs, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Utako Takagi, Yuichiro Ezoe, Kensuke Ishizu, Teppei Moriyama
Proc. ASME. MSEC2010, ASME 2010 International Manufacturing Science and Engineering Conference, Volume 1, 87-94, October 12–15, 2010
Paper No: MSEC2010-34121
https://doi.org/10.1115/MSEC2010-34121
View Paper titled, Magnetic Field Assisted Finishing of Silicon MEMS Micro-Pore X-Ray Optics
Open the PDF for Magnetic Field Assisted Finishing of Silicon MEMS Micro-Pore X-Ray Optics in another window
Topics: Finishing, Magnetic fields, Microelectromechanical systems, Silicon, X-ray optics, Finishes, X-rays, Annealing, Atomic force microscopy, Hydrogen